• DocumentCode
    1026181
  • Title

    Anode spot plasma deposition of insulating layers on aluminum

  • Author

    Ghaemi, Mohammad S. ; Cooney, Jamie ; Tao, Jin ; Lim, Wee-beng ; Lonngren, Karl E.

  • Author_Institution
    Iowa Univ., Iowa City, IA, USA
  • Volume
    18
  • Issue
    2
  • fYear
    1990
  • fDate
    4/1/1990 12:00:00 AM
  • Firstpage
    249
  • Lastpage
    251
  • Abstract
    The deposition of an insulating layer upon an aluminum plate in an argon plasma is described. The process is effected in a low-power DC discharge to which a small amount of sulfur hexafluoride (SF6) has been added, causing the formation of anode spots at sharp metallic surfaces. The insulator is deposited in the region beneath the spot
  • Keywords
    aluminium; plasma deposition; Al; Ar-SF6; anode spot plasma deposition; insulating layers; low-power DC discharge; sharp metallic surfaces; Aluminum; Anodes; Argon; Cities and towns; Gas insulation; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Surface discharges;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.131029
  • Filename
    131029
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1026181