DocumentCode
1026441
Title
An investigation of Si-SiO2 and Si-Ta2 O5 interfaces prepared by reactive sputtering
Author
Akiyama, Kazunari ; Ishihara, Takuya ; Takemoto, T. ; Terui, Y.
Author_Institution
Matsushita Electric Industrial Company, Ltd.
Issue
42591
fYear
1966
Firstpage
672
Lastpage
672
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1966.15765
Filename
1474355
Link To Document