DocumentCode

1026505

Title

A frequency selective device utilizing the mechanical resonance of a silicon substrate

Author

Wilfinger, R.J. ; Chhabra, D.S. ; Bardell, P.H.

Author_Institution

IBM Corporation

Issue

42591

fYear

1966

Firstpage

673

Lastpage

673

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1966.15772

Filename

1474362