Title :
Optical activation of a silicon vibrating sensor
Author :
Andres, Miguel V. ; Foulds, K.W.H. ; Tudor, M.J.
Author_Institution :
University of Valencia, Department of Electricity & Magnetism, Valencia, Spain
Abstract :
The operation of a micromachined silicon vibrating sensor with both optical excitation and optical interrogation is reported. The proper locations at which the optical excitation should be applied for optimum excitation of different modes of resonance are described.
Keywords :
electric sensing devices; elemental semiconductors; vibration measurement; Si; modes; optical excitation; optical interrogation; resonance; vibrating sensor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19860752
