DocumentCode

1027279

Title

Influence of ion pairing on impurity profiles in double diffused silicon devices

Author

Cohen, B.G.

Author_Institution

Bell Telephone Laboratories, Inc.

Issue

11

fYear

1966

Firstpage

816

Lastpage

816

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1966.15849

Filename

1474439