Magnetic anisotropy of Mo-permalloy films deposited on moving PET webs by facing target sputtering method

Permalloy films tend to show magnetic anisotropy if prepared continuously in a roll coater. As major origins of such, the magnetic field and the inverse magnetostrictive effects were evaluated for Mo-permalloy films formed on moving polyethylene terephthalate (PET) webs using Facing Target Sputtering (FTS). The permalloy films were prepared in two arrangements of FTS, so that the magnetic field on the substrate was parallel to the machine direction of the PET webs (case I) or to the transverse direction (case II). In both cases, two kinds of alloy targets (TA and TB) with different magnetostriction constants (λ) were used. Measurement of λ was made, beforehand. The magnetoelastic anisotropy constants (Kσ) and the field-induced anisotropy constants (Kind) were experimentally determined as in the text. The total magnetic anisotropy constants were calculated as Ku= Kσ+ Kind. These values of Kuwere compared with Kumeasured by a torque magnetometer for four samples (case I or lI, each with TA or TB).