Title :
Bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of LiNbO3
Author :
Nakamura, Kentaro ; Shimizu, Hiroshi
Author_Institution :
Tohoku University, Faculty of Engineering, Sendai, Japan
Abstract :
A new BAW transducer consisting of a groove array on a surface of LiNbO3 and finger electrodes on the top surface and the groove bottoms is described. It is demonstrated that the shear-wave transducer fabricated on X-cut LiNbO3 has a conversion loss as low as 2.5 dB and a fractional bandwidth of about 110%.
Keywords :
lithium compounds; piezoelectric transducers; 10 to 120 MHz; BAW transducer; X-cut LiNbO3; bulk acoustic wave transducer; conversion loss; finger electrodes; fractional bandwidth; groove array; grooved surface of LiNbO3; interdigital electrodes; shear-wave transducer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870054
