• DocumentCode
    1029120
  • Title

    Bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of LiNbO3

  • Author

    Nakamura, Kentaro ; Shimizu, Hiroshi

  • Author_Institution
    Tohoku University, Faculty of Engineering, Sendai, Japan
  • Volume
    23
  • Issue
    2
  • fYear
    1987
  • Firstpage
    74
  • Lastpage
    75
  • Abstract
    A new BAW transducer consisting of a groove array on a surface of LiNbO3 and finger electrodes on the top surface and the groove bottoms is described. It is demonstrated that the shear-wave transducer fabricated on X-cut LiNbO3 has a conversion loss as low as 2.5 dB and a fractional bandwidth of about 110%.
  • Keywords
    lithium compounds; piezoelectric transducers; 10 to 120 MHz; BAW transducer; X-cut LiNbO3; bulk acoustic wave transducer; conversion loss; finger electrodes; fractional bandwidth; groove array; grooved surface of LiNbO3; interdigital electrodes; shear-wave transducer;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19870054
  • Filename
    4257302
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1029120