• DocumentCode
    1029601
  • Title

    Optically excited resonant diaphragm pressure sensor

  • Author

    Uttamchandani, Deepak ; Thornton, K.E.B. ; Nixon, J. ; Culshaw, Brian

  • Author_Institution
    University of Strathclyde, Department of Electronic & Electrical Engineering, Glasgow, UK
  • Volume
    23
  • Issue
    4
  • fYear
    1987
  • Firstpage
    152
  • Lastpage
    153
  • Abstract
    Silicon diaphragms fabricated by anisotropic etching are coated with a thin layer of aluminium. An intensitymodulated laser beam focused on the diphragm generates transverse vibrations which are detected interferometrically. Differential pressure is applied to the diaphragm and the pressure-induced change in the fundamental resonant frequency is reported.
  • Keywords
    diaphragms; laser beam applications; light interferometry; nonelectric sensing devices; pressure transducers; Al coating; Si diaphragm; anisotropic etching; fundamental resonant frequency; intensity-modulated laser beam; interferometric detection; resonant diaphragm pressure sensor; transverse vibrations;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19870107
  • Filename
    4257387
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1029601