Title :
A bibliography of metal-insulator-semiconductor studies
Author :
Schlegel, Earl S.
Author_Institution :
Philco-Ford Corporation, Blue Bell, Pa.
fDate :
11/1/1967 12:00:00 AM
Abstract :
A bibliography of more than 550 papers in the field of metal-insulator-semiconductor theory and technology provides a catalog of the published work so that investigators can more easily relate their work to that reported by others. In most of the papers, the insulator layer discussed is SiO2or silicon nitride, and the semiconductor is silicon. The information has been arranged according to the following major classifications: MOS transistor behavior physics preparation of oxide layers techniques for evaluating insulator layers related information from the field of glass technology device fabrication technology radiation effects alternative materials.
Keywords :
Bibliographies; Fabrication; Glass; Insulation; MOSFETs; Metal-insulator structures; Paper technology; Physics; Radiation effects; Silicon on insulator technology;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1967.16101