Title :
Proton and sodium transport in SiO2films
Author :
Hofstein, Steven R.
Author_Institution :
RCA Laboratories, Princeton, N. J.
fDate :
11/1/1967 12:00:00 AM
Abstract :
The results of an investigation into the relative roles of sodium and proton transport in silicon-dioxide films are presented. Tritium oxide (3H2O), tritiated ethanol, neutron activation, and sodium 22 tracer analyses are used to identify the mobile ions directly, and the results of these analyses are then directly correlated with the observed electrical behavior.
Keywords :
Ethanol; Helium; Molecular beam epitaxial growth; Neutrons; Oxidation; Protons; Semiconductor films; Silicon; Surface contamination; Water pollution;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1967.16102