DocumentCode :
1029826
Title :
Proton and sodium transport in SiO2films
Author :
Hofstein, Steven R.
Author_Institution :
RCA Laboratories, Princeton, N. J.
Volume :
14
Issue :
11
fYear :
1967
fDate :
11/1/1967 12:00:00 AM
Firstpage :
749
Lastpage :
759
Abstract :
The results of an investigation into the relative roles of sodium and proton transport in silicon-dioxide films are presented. Tritium oxide (3H2O), tritiated ethanol, neutron activation, and sodium 22 tracer analyses are used to identify the mobile ions directly, and the results of these analyses are then directly correlated with the observed electrical behavior.
Keywords :
Ethanol; Helium; Molecular beam epitaxial growth; Neutrons; Oxidation; Protons; Semiconductor films; Silicon; Surface contamination; Water pollution;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1967.16102
Filename :
1474825
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1029826
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