(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

Author

Tilmans, H.A.C. ; Legtenberg, R. ; Schurer, H. ; Ijntema, D.J. ; Elwenspoek, M. ; Fluitman, J.H.J.

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

41

Issue

1

fYear

1994

Firstpage

4

Lastpage

6

Abstract

The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 /spl mu/m long, 100 /spl mu/m wide, and 1.5 /spl mu/m thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar.<>

Keywords

electrostatic devices; elemental semiconductors; encapsulation; micromechanical devices; resonators; silicon; strain gauges; 0.01 mbar; 0.15 mbar; 1.5 micron; 100 micron; 210 to 510 micron; 324 kHz; Si; cavity pressures; design; electro-mechanical characteristics; electrostatically driven vacuum encapsulated polysilicon resonators; fabrication; fundamental frequency; gauge factor; intrinsic quality factors; performance; quality factor; resonant strain gauge; resonating beams; Capacitive sensors; Chemicals; Conducting materials; Electrostatics; Fabrication; Frequency; Mechanical sensors; Q factor; Resonance; Silicon;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.265813

Filename

265813