Title :
A high-performance master chip for logic circuits
Author :
Chen, C.Y. ; Feinberg, I.
fDate :
6/1/1968 12:00:00 AM
Keywords :
Bipolar transistors; Fabrication; Large scale integration; Logic circuits; MOSFETs; Moisture; Shift registers; Silicon compounds; Substrates; Threshold voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16207
