16-term error model and calibration procedure for on-wafer network analysis measurements

Author

Butler, John V. ; Rytting, Douglas K. ; Iskander, Magdy F. ; Pollard, Roger D. ; Vanden Bossche, Marc

Author_Institution

Dept. of Electr. Eng., Utah Univ., Salt Lake City, UT, USA

Volume

39

Issue

12

fYear

1991

fDate

12/1/1991 12:00:00 AM

Firstpage

2211

Lastpage

2217

Abstract

Vector network measurements are enhanced by calibrating the measurement system over the entire band of interest. This is done using a 12-term error correction model. Many measurement systems, including open air devices such as MMIC wafer probes, contain leakage and coupling error terms not modeled in current calibration systems. All error terms in such a system are included in a new 16-term error model and calibration procedure. Corrected measurements using the 16-term calibration procedure are compared with thru-reflect-line (TRL) and 12-term calibration measurements, and excellent agreement is observed for a nonleaky system. For a leaky system, the 12-term model is shown to break down, while the 16-term model retains its accuracy. The results validate the accuracy and viability of the calibration procedure for MMIC wafer probe measurements and other measurement systems containing leakage

Keywords

MMIC; S-parameters; calibration; error correction; integrated circuit testing; measurement errors; microwave measurement; network analysers; 16-term error model; MMIC wafer probe measurements; calibration procedure; coupling error; error correction; leaky system; on-wafer network analysis measurements; onwafer measurements; open air devices; vector network measurements; Calibration; Cities and towns; Current measurement; Error correction; Fixtures; MMICs; Probes; Scattering parameters; Semiconductor device modeling; Testing;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.106567

Filename

106567