Title :
Air-gap-isolated microcircuits (beam-lead devices)
Author :
Rosvold, W.C. ; Legat, W.H.
fDate :
6/1/1968 12:00:00 AM
Keywords :
Circuits; Electron optics; Electrostatics; Etching; Focusing; Magnetic anisotropy; Magnetic shielding; Perpendicular magnetic anisotropy; Silicon; Testing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16262