DocumentCode

1031356

Title

Air-gap-isolated microcircuits (beam-lead devices)

Author

Rosvold, W.C. ; Legat, W.H.

Volume

15

Issue

6

fYear

1968

fDate

6/1/1968 12:00:00 AM

Firstpage

420

Lastpage

420

Keywords

Circuits; Electron optics; Electrostatics; Etching; Focusing; Magnetic anisotropy; Magnetic shielding; Perpendicular magnetic anisotropy; Silicon; Testing;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1968.16262

Filename

1475164