DocumentCode :
1031356
Title :
Air-gap-isolated microcircuits (beam-lead devices)
Author :
Rosvold, W.C. ; Legat, W.H.
Volume :
15
Issue :
6
fYear :
1968
fDate :
6/1/1968 12:00:00 AM
Firstpage :
420
Lastpage :
420
Keywords :
Circuits; Electron optics; Electrostatics; Etching; Focusing; Magnetic anisotropy; Magnetic shielding; Perpendicular magnetic anisotropy; Silicon; Testing;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1968.16262
Filename :
1475164
Link To Document :
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