DocumentCode
1031383
Title
Anisotropic etching for forming isolation slots in silicon beam-leaded integrated circuits
Author
Waggener, H.A. ; Tyler, A.L.
Volume
15
Issue
6
fYear
1968
fDate
6/1/1968 12:00:00 AM
Firstpage
420
Lastpage
420
Keywords
Anisotropic magnetoresistance; Circuits; Electron optics; Electrostatics; Etching; Focusing; Magnetic anisotropy; Perpendicular magnetic anisotropy; Silicon; Testing;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1968.16264
Filename
1475166
Link To Document