DocumentCode
1032067
Title
Microwave plasma spray in application to process microwave Ferrite films
Author
Awao, Yuuichi ; Nikawa, Yoshio ; Okada, Fumiaki
Author_Institution
The National Defense Academy, Yokosuka, Japan
Volume
23
Issue
5
fYear
1987
fDate
9/1/1987 12:00:00 AM
Firstpage
3733
Lastpage
3735
Abstract
A newly developed microwave torch is presented which produces high temperature plasma, The torch is designed to process ferrite films by microwave plasma spray, The impedance matching of this torch is improved when the plasma of the oxygen and argon gas is generated in a proper ratio, The torch has no electrodes, thus it generates pure plasma. The microwave properties of the ferrite films (CaVIG ferrite) deposited by the plasma spray is nearly equal to that of bulk.
Keywords
Ferrite materials/devices; Magnetic films/devices; Materials processing; Microwave plasma generation; Argon; Electrodes; Ferrite films; Impedance matching; Microwave generation; Plasma applications; Plasma properties; Plasma temperature; Process design; Thermal spraying;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1987.1065742
Filename
1065742
Link To Document