DocumentCode :
1032067
Title :
Microwave plasma spray in application to process microwave Ferrite films
Author :
Awao, Yuuichi ; Nikawa, Yoshio ; Okada, Fumiaki
Author_Institution :
The National Defense Academy, Yokosuka, Japan
Volume :
23
Issue :
5
fYear :
1987
fDate :
9/1/1987 12:00:00 AM
Firstpage :
3733
Lastpage :
3735
Abstract :
A newly developed microwave torch is presented which produces high temperature plasma, The torch is designed to process ferrite films by microwave plasma spray, The impedance matching of this torch is improved when the plasma of the oxygen and argon gas is generated in a proper ratio, The torch has no electrodes, thus it generates pure plasma. The microwave properties of the ferrite films (CaVIG ferrite) deposited by the plasma spray is nearly equal to that of bulk.
Keywords :
Ferrite materials/devices; Magnetic films/devices; Materials processing; Microwave plasma generation; Argon; Electrodes; Ferrite films; Impedance matching; Microwave generation; Plasma applications; Plasma properties; Plasma temperature; Process design; Thermal spraying;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1987.1065742
Filename :
1065742
Link To Document :
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