Title :
Generating multiple images for integrated circuits by Fourier-transform holograms
Author :
Lu, Siyu ; Caulfield, H.J.
fDate :
6/1/1968 12:00:00 AM
Keywords :
Application specific integrated circuits; Circuit noise; Etching; Fabrication; Image generation; Instruments; Interference; Lenses; Silicon; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16352
