Title :
A reduction camera for exposure of microcircuitry onto wafers
fDate :
6/1/1968 12:00:00 AM
Keywords :
Cameras; Circuits; Image generation; Interference; Lenses; Mercury (metals); Optical filters; Optical imaging; Printing; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16354
