DocumentCode

1032346

Title

A reduction camera for exposure of microcircuitry onto wafers

Author

Harper, J.S.

Volume

15

Issue

6

fYear

1968

fDate

6/1/1968 12:00:00 AM

Firstpage

436

Lastpage

436

Keywords

Cameras; Circuits; Image generation; Interference; Lenses; Mercury (metals); Optical filters; Optical imaging; Printing; Substrates;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1968.16354

Filename

1475256