1032348

Erratum: Wavelength dependence of optical oxidation of silicon

Boyd, I.W. ; Micheli, F.

23

9

1987

480

laser beam applications; laser beam effects; oxidation; semiconductor technology; silicon; Ar laser; CW Ar laser radiation; Si oxidation; laser enhanced oxidation of Si; oxidation rate; photonic contribution; wavelength dependence;

English

Electronics Letters

iet

0013-5194

jour

10.1049/el:19870345

4257675