• DocumentCode
    1032998
  • Title

    Dielectrically isolated saturating circuits

  • Author

    Lee, F.H.

  • Volume
    15
  • Issue
    9
  • fYear
    1968
  • fDate
    9/1/1968 12:00:00 AM
  • Firstpage
    645
  • Lastpage
    650
  • Abstract
    A description of the three main substrate preparation processes to achieve silicon dioxide dielectric isolation are described. The use of dielectric isolation for high-speed and low-power circuits is outlined, with calculations of saturation resistance and transient characteristics. Introduction of carrier lifetime-reducing gold into a dielectrically isolated wafer can cause problems, which are delineated. Final results are listed and Photomicrographs of working circuits are presented.
  • Keywords
    Conductivity; Dielectric substrates; Dielectric thin films; Diodes; Geometry; Gold; Molecular beam epitaxial growth; Monolithic integrated circuits; Parasitic capacitance; Silicon compounds;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1968.16422
  • Filename
    1475324