Title :
Dielectrically isolated saturating circuits
fDate :
9/1/1968 12:00:00 AM
Abstract :
A description of the three main substrate preparation processes to achieve silicon dioxide dielectric isolation are described. The use of dielectric isolation for high-speed and low-power circuits is outlined, with calculations of saturation resistance and transient characteristics. Introduction of carrier lifetime-reducing gold into a dielectrically isolated wafer can cause problems, which are delineated. Final results are listed and Photomicrographs of working circuits are presented.
Keywords :
Conductivity; Dielectric substrates; Dielectric thin films; Diodes; Geometry; Gold; Molecular beam epitaxial growth; Monolithic integrated circuits; Parasitic capacitance; Silicon compounds;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1968.16422