DocumentCode
1032998
Title
Dielectrically isolated saturating circuits
Author
Lee, F.H.
Volume
15
Issue
9
fYear
1968
fDate
9/1/1968 12:00:00 AM
Firstpage
645
Lastpage
650
Abstract
A description of the three main substrate preparation processes to achieve silicon dioxide dielectric isolation are described. The use of dielectric isolation for high-speed and low-power circuits is outlined, with calculations of saturation resistance and transient characteristics. Introduction of carrier lifetime-reducing gold into a dielectrically isolated wafer can cause problems, which are delineated. Final results are listed and Photomicrographs of working circuits are presented.
Keywords
Conductivity; Dielectric substrates; Dielectric thin films; Diodes; Geometry; Gold; Molecular beam epitaxial growth; Monolithic integrated circuits; Parasitic capacitance; Silicon compounds;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1968.16422
Filename
1475324
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