DocumentCode
1033529
Title
Application of LFB acoustic microscope to film thickness measurements
Author
Kushibiki, J. ; Chubachi, N.
Author_Institution
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Volume
23
Issue
12
fYear
1987
Firstpage
652
Lastpage
654
Abstract
The line-focus-beam (LFB) acoustic microscope is applied to measure the precise thickness of thin films using the velocity dispersion of leaky waves in layered samples. The measurement principle and accuracy are investigated theoretically and experimentally, taking a configuration of Au-film on fused quartz. It is demonstrated at 225 MHz that the thickness resolution better than 2 Ã… is achieved for a 3000 Ã… sample using leaky pseudosurface acoustic waves.
Keywords
acoustic microscopy; surface acoustic waves; thickness measurement; 225 MHz; 3000 A; Au-SiO2; Au-film on fused quartz; LFB acoustic microscope; accuracy; film thickness measurements; layered samples; leaky pseudosurface acoustic waves; line focus beam acoustic microscope; operation; thickness resolution; thin films; velocity dispersion of leaky waves;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19870467
Filename
4257800
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