DocumentCode
1033870
Title
A highly sensitive Pb(Zr,Ti)O3 thin film ultrasonic micro-sensor with a grooved diaphragm
Author
Matsushima, Tomoaki ; Xiong, Sibei ; Kawada, Hiroshi ; Yamanaka, Hiroshi ; Muralt, Paul
Author_Institution
Matsushita Electr. Works, Ltd., Osaka
Volume
54
Issue
12
fYear
2007
fDate
12/1/2007 12:00:00 AM
Firstpage
2439
Lastpage
2445
Abstract
A highly sensitive piezoelectric ultrasonic micro-sensor with a grooved multilayer membrane was developed by a Si-based MEMS technique. The groove was located at one-quarter of the distance away from the edge of the membrane and opened into piezoelectric layer. The piezoelectric layer Pb(Zr,Ti)O3 (PZT) was 2.2 mum thick and was prepared by a sol-gel method. The prepared PZT film was pure perovskite and showed a highly (100) textured structure. The sensitivity of the fabricated piezoelectric ultrasonic sensor without the groove structure was 100 muV/Pa. In comparison, the sensitivity of the ultrasonic sensor with the groove structure was about 500 muV/Pa, which is 5 times that without the groove structure. The diaphragm having grooves showed a corrugate-like structure that was formed by residual stress. The high sensitivity of the membrane with the grooved diaphragm is considered to relate to the corrugate-like structure.
Keywords
internal stresses; lead compounds; microsensors; piezoelectric devices; piezoelectric thin films; texture; thin film sensors; ultrasonic devices; (100) texture; PZT; Si-based MEMS technique; corrugate-like structure; grooved diaphragm; grooved multilayer membrane; highly sensitive piezoelectric thin film ultrasonic microsensor; perovskite film; residual stress; sol-gel method; Biomembranes; Electrodes; Fabrication; Mechanical sensors; Micromechanical devices; Nonhomogeneous media; Piezoelectric films; Residual stresses; Sensor phenomena and characterization; Thin film sensors; Electrochemistry; Equipment Design; Equipment Failure Analysis; Image Enhancement; Lead; Materials Testing; Membranes, Artificial; Microelectrodes; Reproducibility of Results; Sensitivity and Specificity; Titanium; Transducers; Ultrasonography; Zirconium;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2007.557
Filename
4430021
Link To Document