DocumentCode
1034162
Title
Additional bibliography of metal—Insulator—Semiconductor studies
Author
Schlegel, Earl S.
Author_Institution
Philco-Ford Corporation, Blue Bell, Pa.
Volume
15
Issue
12
fYear
1968
fDate
12/1/1968 12:00:00 AM
Firstpage
951
Lastpage
954
Abstract
A supplementary bibliography containing 158 papers in the field of metal-insulator-semiconductor theory and technology updates the bibliography previously published in this TRANSACTIONS. The classifications are as follows: MOS transistor behavior, physics, preparation of oxide layers, techniques for evaluating insulator layers, device fabrication technology, radiation effects, alternative materials to SiO2 .
Keywords
Bibliographies; Doping; Electron devices; FETs; Gold; MOSFETs; Metal-insulator structures; Physics; Silicon; Solid state circuits;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1968.16544
Filename
1475446
Link To Document