DocumentCode
1034171
Title
IGFET Analysis through numerical solution of Poisson´s equation
Author
Schroeder, James E. ; Muller, Richard S.
Author_Institution
University of California, Berkeley, Calif.
Volume
15
Issue
12
fYear
1968
fDate
12/1/1968 12:00:00 AM
Firstpage
954
Lastpage
961
Abstract
Numerical techniques have been used to obtain the field distribution in IGFETs under saturated bias conditions. The numerical solution of Poisson´s equation is obtained with fewer simplifying assumptions than are necessary to obtain an analytic solution. The numerical solution is used to calculate the change in channel length as bias values are varied. These changes are used to predict the voltage dependences of drain current, drain conductance and transconductance in saturation. The potential solutions also permit a rough calculation of breakdown voltages. A comparison is made between the theoretical results and measurements on IGFETs of varying dimensions and doping concentrations.
Keywords
Aluminum; Chemicals; Insulation; Phosphors; Poisson equations; Semiconductor films; Silicon; Springs; Thermal decomposition; Transconductance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1968.16545
Filename
1475447
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