Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

Author

Stolle, C. ; Bartenwerfer, Malte ; Celle, C. ; Simonato, J. ; Fatikow, Sergej

Author_Institution

Div. of Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg, Germany

Volume

18

Issue

3

fYear

2013

fDate

Jun-13

Firstpage

887

Lastpage

894

Abstract

This paper gives insight into nanorobotic handling and electrical characterization of silicon nanowires (SiNWs) inside a scanning electron microscope. The synthesis of metal-assisted etched both end doped SiNWs is presented. Several nanorobotic pick and place strategies for handling individual nanowires are discussed. Key approaches such as force-based and adhesive bonding (focus ion and electron beam induced deposition) have been realized experimentally and evaluated toward their suitability for automation. Preliminary results on electrical characterization are presented.

Keywords

etching; grippers; micromanipulators; nanowires; scanning electron microscopes; SiNW; adhesive bonding; electrical characterization; electron beam induced deposition; focus ion; force-based bonding; gripper-based handling; metal-assisted etched silicon nanowire characterization; metal-assisted etched silicon nanowire handling; metal-assisted etched synthesis; nanorobotic handling; nanorobotic pick-place strategy; nanorobotic strategy; scanning electron microscope; Etching; Force; Grippers; Nanowires; Silicon; Substrates; Tungsten; Electrical characterization; handling strategies; material characterization; nanorobotics; silicon-nanowires;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/TMECH.2012.2193591

Filename

6191357