DocumentCode
1034331
Title
Internal dielectric transduction: optimal position and frequency scaling
Author
Weinstein, Dana ; Bhave, Sunil A.
Author_Institution
Cornell Univ., Ithaca
Volume
54
Issue
12
fYear
2007
fDate
12/1/2007 12:00:00 AM
Firstpage
2696
Lastpage
2698
Abstract
We propose the optimal design for "internal dielectric transduction" of longitudinal bulk mode resonators. This transduction increases in efficiency as the dielectric thickness approaches half the acoustic wavelength. With dielectric films at positions of maximum strain (minimum displacement) in the resonator, 60 GHz resonators are proposed with 50 Omega motional impedance.
Keywords
dielectric resonators; dielectric thin films; thin film devices; acoustic wavelength; dielectric films; frequency 60 GHz; frequency scaling; internal dielectric transduction; longitudinal bulk mode resonators; Air gaps; Dielectric films; Electrostatics; Impedance; Micromechanical devices; Permittivity; Q factor; Resonance; Resonant frequency; Transducers;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2007.598
Filename
4430062
Link To Document