DocumentCode
1035440
Title
Inspection of periodic patterns with intensity spatial filters
Author
Watkins, L.S.
Volume
16
Issue
2
fYear
1969
fDate
2/1/1969 12:00:00 AM
Firstpage
247
Lastpage
247
Keywords
Computer graphics; Conductivity; Dielectric breakdown; Dielectric constant; Dielectric losses; Inspection; Integrated circuit interconnections; Nonhomogeneous media; Semiconductor films; Spatial filters;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1969.16677
Filename
1475719
Link To Document