DocumentCode :
1035440
Title :
Inspection of periodic patterns with intensity spatial filters
Author :
Watkins, L.S.
Volume :
16
Issue :
2
fYear :
1969
fDate :
2/1/1969 12:00:00 AM
Firstpage :
247
Lastpage :
247
Keywords :
Computer graphics; Conductivity; Dielectric breakdown; Dielectric constant; Dielectric losses; Inspection; Integrated circuit interconnections; Nonhomogeneous media; Semiconductor films; Spatial filters;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1969.16677
Filename :
1475719
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1035440
