DocumentCode
1037221
Title
A silicon integrated circuit force sensor
Author
Fulkerson, David E.
Author_Institution
Honeywell, Inc., Hopkins, Minn.
Volume
16
Issue
10
fYear
1969
fDate
10/1/1969 12:00:00 AM
Firstpage
867
Lastpage
870
Abstract
A piezoresistive bridge and integrated circuit amplifier can be made in the same silicon cantilever. The purpose of the amplifier is to linearize as well as amplify the output.
Keywords
Bridge circuits; Force sensors; Magnetic field induced strain; Magnetic sensors; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Stress; Temperature sensors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1969.16871
Filename
1475913
Link To Document