DocumentCode
1038477
Title
The growing use of electron beams for processing in microelectronics
Author
Angello, Stephen J.
Author_Institution
Westinghouse Research Laboratories, Pittsburgh, Pa.
Volume
17
Issue
6
fYear
1970
fDate
6/1/1970 12:00:00 AM
Firstpage
442
Lastpage
445
Abstract
Four original papers are assembled in this issue to highlight the work which is being carried out on the use of electron beams in microelectronics. A brief background description is given of the phenomena which are of interest for microelectronics. This is followed by short descriptions of the scanning electron microscope and an electron projection system. Various features of the original papers are tied in with the background material.
Keywords
Assembly; Electron beams; Electron emission; Instruments; Microelectronics; Radiative recombination; Resists; Silicon; Solids; X-rays;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1970.17006
Filename
1476190
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