Title :
Three-dimensional micro-Fresnel optical elements fabricated by micromachining technique
Author :
Lin, Lih Y. ; Lee, S.S. ; Pister, K.S.J. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA
fDate :
3/3/1994 12:00:00 AM
Abstract :
The authors report, for the first time, a three-dimensional binary phase micro-Fresnel optical element standing perpendicular to the substrate. The optical element is fabricated by a micromachining technique. The element has a diameter of 650 μm, a focal length of 0.5 mm and an optical axis of 1 mm above the surface of the substrate. Light from an optical fibre is successfully collimated by the micro-optical element, and the beam profile closely approximates a Gaussian shape
Keywords :
integrated optics; optical collimators; optical workshop techniques; optical zone plates; 0.5 mm; 650 micron; Fresnel zone plate; Gaussian shape; beam profile; diameter; focal length; light collimation; micro-optical element; micromachining technique; optical axis; optical fibre; substrate; three-dimensional binary phase micro-Fresnel optical element;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19940277
