Title :
Demonstration of blazing effect in second order gratings under resonant condition
Author :
Hagberg, M. ; Kjellberg, T. ; Eriksson, N. ; Larsson, A.G.
Author_Institution :
Dept. of Optoelectron. & Electr. Meas., Chalmers Univ. of Technol., Goteborg
fDate :
3/3/1994 12:00:00 AM
Abstract :
Surface-emitting InGaAs/AlGaAs lasers with a second order blazed surface grating as one feedback element were fabricated using electron beam lithography and chemically assisted ion beam etching. A strong dependence of the surface emission efficiency on the grating orientation was observed
Keywords :
III-V semiconductors; aluminium compounds; diffraction gratings; electron beam lithography; gallium arsenide; indium compounds; laser cavity resonators; optical workshop techniques; semiconductor lasers; sputter etching; InGaAs-AlGaAs; InGaAs/AlGaAs; blazing effect; chemically assisted ion beam etching; electron beam lithography; feedback element; grating orientation; resonant condition; second order blazed surface grating; second order gratings; strong dependence; surface emission efficiency; surface-emitting lasers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19940267
