DocumentCode
1039761
Title
Demonstration of blazing effect in second order gratings under resonant condition
Author
Hagberg, M. ; Kjellberg, T. ; Eriksson, N. ; Larsson, A.G.
Author_Institution
Dept. of Optoelectron. & Electr. Meas., Chalmers Univ. of Technol., Goteborg
Volume
30
Issue
5
fYear
1994
fDate
3/3/1994 12:00:00 AM
Firstpage
410
Lastpage
412
Abstract
Surface-emitting InGaAs/AlGaAs lasers with a second order blazed surface grating as one feedback element were fabricated using electron beam lithography and chemically assisted ion beam etching. A strong dependence of the surface emission efficiency on the grating orientation was observed
Keywords
III-V semiconductors; aluminium compounds; diffraction gratings; electron beam lithography; gallium arsenide; indium compounds; laser cavity resonators; optical workshop techniques; semiconductor lasers; sputter etching; InGaAs-AlGaAs; InGaAs/AlGaAs; blazing effect; chemically assisted ion beam etching; electron beam lithography; feedback element; grating orientation; resonant condition; second order blazed surface grating; second order gratings; strong dependence; surface emission efficiency; surface-emitting lasers;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19940267
Filename
273264
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