DocumentCode :
1039865
Title :
Single beam photoreflectance microscopy system with electronic feedback
Author :
Somekh, M.G.
Volume :
30
Issue :
5
fYear :
1994
fDate :
3/3/1994 12:00:00 AM
Firstpage :
398
Lastpage :
399
Abstract :
A new photoreflectance (PR) system which uses only a single optical beam is described. The PR signal is detected at the second harmonic of the modulation frequency, contained in the backreflected light. To reliably measure this small signal, the second harmonic content of the incident beam is reduced by feedback to the modulator
Keywords :
inspection; laser beam applications; optical microscopes; photoreflectance; semiconductor device testing; backreflected light; electronic feedback; incident beam; modulation frequency; second harmonic content; single beam photoreflectance microscopy; single optical beam;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19940282
Filename :
273273
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1039865
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