Title :
A model for coplanar waveguide transmission line structures on semiconductor substrates
Author :
Nary, K.R. ; Bellare, Kiran G. ; Long, Stephen I.
Author_Institution :
Rockwell Inst. Sci. Center, Thousand Oaks, CA, USA
fDate :
11/1/1993 12:00:00 AM
Abstract :
An accurate model for coplanar waveguide transmission line structures on semiconductive substrates is presented. The model is useful for simulating long (> 0.5 mm) interconnects on LSI and VLSI GaAs circuits as well as high speed Si ICs. When simulated in the frequency domain, the model shows an excellent match to measured S parameters of coplanar waveguide samples
Keywords :
MMIC; S-parameters; VLSI; frequency-domain analysis; waveguide theory; GaAs; GaAs circuits; LSI; S parameters; Si; VLSI; coplanar waveguide transmission line structures; frequency domain simulation; high speed Si ICs; long interconnect simulation; model; semiconductor substrates; Circuit simulation; Coplanar transmission lines; Coplanar waveguides; Distributed parameter circuits; Gallium arsenide; Integrated circuit interconnections; Large scale integration; Semiconductor waveguides; Substrates; Very large scale integration;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
