Title :
Magnetic oxide films
Author :
Mee, J.E. ; Pulliam, G.R. ; Archer, J.L. ; Besser, Paul J.
Author_Institution :
Autonetics, Division of North American Rockwell, Anaheim, Calif.
fDate :
12/1/1969 12:00:00 AM
Abstract :
Polycrystalline and epitaxial magnetic oxide films have been fabricated by several investigators. This paper deals predominantly with epitaxial films grown by chemical vapor deposition. The majority of the discussion is concerned with substrates, the deposition process, and film characterization. Where possible, comparisons are made with bulk crystals and with films produced by other fabrication techniques.
Keywords :
Bibliographies; Magnetic films; Chemical vapor deposition; Crystals; Epitaxial growth; Fabrication; Ferrite films; Garnet films; Magnetic films; Radio frequency; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1969.1066642