Semiconductor wafer representation for TCAD

Author

Giles, Martin D. ; Boning, Duane S. ; Chin, Goodwin R. ; Dietrich, Walter C., Jr. ; Karasick, M.S. ; Law, Mark E. ; Mozumder, Purnendu K. ; Nackman, Lee R. ; Rajan, V.T. ; Walker, D.M.H. ; Wang, Robert H. ; Wong, Alexander S.

Author_Institution

Michigan Univ., Ann Arbor, MI, USA

Volume

13

Issue

1

fYear

1994

fDate

1/1/1994 12:00:00 AM

Firstpage

82

Lastpage

95

Abstract

This paper describes the Semiconductor Wafer Representation (SWR) for representing and manipulating wafer state during process and device simulation. The goal of the SWR is to provide an object-oriented interface to a collection of functions designed for developing and integrating Technology CAD (TCAD) applications. By providing functions which can be common across many applications, we aim to greatly reduce tool development and integration time. Corporate, vendor, and university TCAD developers have worked together under the auspices of the CAD Framework Initiative to create an architecture and C++ programming interface for an SWR 1.0 draft standard. Here we describe this architecture and the results of creating and using a prototype implementation of the standard both to integrate existing TCAD tools and to develop simple new tools

Keywords

CAD; object-oriented programming; semiconductor device models; semiconductor process modelling; user interfaces; C++ programming interface; SWR 1.0 draft standard; TCAD; architecture; device simulation; object-oriented interface; process simulation; semiconductor wafer representation; technology CAD; wafer state manipulation; wafer state representation; Circuit simulation; Computational modeling; Design automation; Design optimization; Fabrication; Manufacturing processes; Numerical simulation; Object oriented modeling; Process design; Standards development;

fLanguage

English

Journal_Title

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on

Publisher

ieee

ISSN

0278-0070

Type

jour

DOI

10.1109/43.273747

Filename

273747