Title :
Method for manufacturing embedded variable capacitors in low-temperature cofired ceramic substrate
Author :
Tick, T. ; Palukuru, V. ; Komulainen, M. ; Peräntie, J. ; Jantunen, H.
Author_Institution :
Univ. of Oulu, Oulu
Abstract :
A method for manufacturing embedded variable capacitors (varactors) inside a low-temperature cofired ceramic substrate is presented. A varactor is fabricated by filling a via hole with ferroelectric barium strontium titanate paste. The measured capacitance of the varactor changed from 1.47 to 0.97 pF and the Q factor from 18.2 to 31.5 at 1 GHz when the bias voltage was increased from 0 to 200 V.
Keywords :
varactors; capacitance 1.47 pF to 0.97 pF; embedded variable capacitor manufacturing; ferroelectric barium strontium titanate paste; frequency 1 GHz; low-temperature cofired ceramic substrate; varactor capacitance; voltage 0 V to 200 V;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20083014
