DocumentCode :
1044451
Title :
Thermal resistance of metamorphic InP-based HBTs on GaAs substrates using a linearly graded InxGa1-xP metamorphic buffer
Author :
Yang, Hong ; Wang, Hong ; Radhakrishnan, K. ; Tan, Chee Leong
Author_Institution :
Microelectron. Center, Nanyang Technol. Univ., Singapore, Singapore
Volume :
51
Issue :
8
fYear :
2004
Firstpage :
1221
Lastpage :
1227
Abstract :
Thermal properties of metamorphic InP-InGaAs heterojunction bipolar transistors (HBTs) on GaAs substrates using a linearly graded InGaP buffer have been investigated. Compared to the widely used InAlAs metamorphic buffer, InGaP offers better thermal properties resulting in a much smaller thermal resistance for the metamorphic HBTs (MHBTs). Theoretical calculations of the thermal resistance of devices have been made based on a simple constant heat-spreading model, and the results are shown to be consistent with experimental results. It has been made clear that the smaller thermal resistance measured from the MHBTs using a linearly graded InGaP buffer is due to the small bowing parameters and high thermal conductivity of the binary endpoints. Although the use of InGaP as a buffer may slightly degrade the devices thermal properties compared to one using InP directly on GaAs substrate, it gives more freedom to the growth optimization of metamorphic buffer by using compositional grading. With regards to the thermal conductivity and flexible growth optimization, InGaP metamorphic buffer could be considered as an important alternative to the existing InAlAs and InP schemes.
Keywords :
III-V semiconductors; buffer circuits; gallium compounds; heterojunction bipolar transistors; indium compounds; semiconductor device models; substrates; thermal conductivity; thermal resistance; GaAs substrates; InAlAs; InAlAs metamorphic buffer; InGaP; InP-InGaAs; InP-InGaAs HBT; InP-based HBT; binary endpoints; bowing parameter; compositional grading; constant heat-spreading model; flexible growth optimization; heterojunction bipolar transistors; linearly graded InxGa1-xP metamorphic buffer; metamorphic HBT; thermal conductivity; thermal property; thermal resistance; Conductivity measurement; Electrical resistance measurement; Gallium arsenide; Heterojunction bipolar transistors; Indium compounds; Indium phosphide; Resistance heating; Thermal conductivity; Thermal degradation; Thermal resistance; HBTs; Heterojunction bipolar transistors; metamorphic; thermal resistance;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2004.831364
Filename :
1317141
Link To Document :
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