A Copper/Polyimide Fabrication Process for Fabricating High-Inductance Microinductor

This paper reports on a technological process that combines copper as conductor, permalloy as magnetic core material, and polyimide as insulation material to complete a microinductor on glass with high inductance. The shape of the magnetic core scheme was rectangular, of which the width of the long side and short side were 1.4 and 0.6 mm, respectively. The dimensions of the inductor are 3.86 mm times 3.94 mm times 90 mum with coil width of 20 mum and space of 35 mum. The results show that the maximum inductance is 4 muH at 1 MHz, and the maximum quality factor (Q-factor) is 1.5 at 2 MHz.