Title :
Electrical measurement of resistivity fluctuations associated with striations in silicon crystals
Author :
Burtscher, J. ; Dorendorf, H.W. ; Krausse, J.
Author_Institution :
Siemens AG, Munich, Germany
fDate :
8/1/1973 12:00:00 AM
Abstract :
In order to investigate the resistivity fluctuations associated with striations in silicon crystals, the silicon surface was supplied with an arrangement of closely spaced (10 µm) nonblocking aluminum-silicon contacts. The resistivity was measured using a Wheatstone bridge technique. In addition, we used the aluminum-silicon contacts for spreading resistance measurements. Measurements with aluminum-silicon contacts can be repeated, e.g., to demonstrate reproducibility. This is in contrast to the methods using a sequence of direct contacts between the metal probe and the silicon surface.
Keywords :
Bridge circuits; Conductivity; Contacts; Crystals; Electric variables measurement; Electrical resistance measurement; Fluctuations; Reproducibility of results; Silicon; Surface resistance;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1973.17731