DocumentCode
1045934
Title
Analytical formulation of the capacitive coupling voltage contrast of a buried line
Author
Barille, R.
Volume
29
Issue
20
fYear
1993
Firstpage
1756
Lastpage
1758
Abstract
A simple formulation is reported that allows the direct determination of the surface potential induced by capacitive coupling voltage above a conductive line of finite width embedded in the passivation oxide of an integrated circuit. In the same way, this formulation gives good results while avoiding intensive computer simulations.
Keywords
electron beam testing; integrated circuit testing; metallisation; surface potential; voltage measurement; buried line; capacitive coupling voltage contrast; conductive line; passivation oxide; surface potential;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19931170
Filename
274898
Link To Document