DocumentCode :
1045934
Title :
Analytical formulation of the capacitive coupling voltage contrast of a buried line
Author :
Barille, R.
Volume :
29
Issue :
20
fYear :
1993
Firstpage :
1756
Lastpage :
1758
Abstract :
A simple formulation is reported that allows the direct determination of the surface potential induced by capacitive coupling voltage above a conductive line of finite width embedded in the passivation oxide of an integrated circuit. In the same way, this formulation gives good results while avoiding intensive computer simulations.
Keywords :
electron beam testing; integrated circuit testing; metallisation; surface potential; voltage measurement; buried line; capacitive coupling voltage contrast; conductive line; passivation oxide; surface potential;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19931170
Filename :
274898
Link To Document :
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