• DocumentCode
    1045934
  • Title

    Analytical formulation of the capacitive coupling voltage contrast of a buried line

  • Author

    Barille, R.

  • Volume
    29
  • Issue
    20
  • fYear
    1993
  • Firstpage
    1756
  • Lastpage
    1758
  • Abstract
    A simple formulation is reported that allows the direct determination of the surface potential induced by capacitive coupling voltage above a conductive line of finite width embedded in the passivation oxide of an integrated circuit. In the same way, this formulation gives good results while avoiding intensive computer simulations.
  • Keywords
    electron beam testing; integrated circuit testing; metallisation; surface potential; voltage measurement; buried line; capacitive coupling voltage contrast; conductive line; passivation oxide; surface potential;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931170
  • Filename
    274898