• DocumentCode
    1045948
  • Title

    Study of Latent Damage in Power MOSFETs Caused by Heavy Ion Irradiation

  • Author

    Ikeda, Naomi ; Kuboyama, Satoshi ; Satoh, Yohei ; Tamura, Takashi

  • Author_Institution
    Japan Aerosp. Exploration Agency, Tsukuba
  • Volume
    55
  • Issue
    6
  • fYear
    2008
  • Firstpage
    3388
  • Lastpage
    3393
  • Abstract
    The latent damages were investigated for power MOSFETs irradiated by high LET heavy ions. It was demonstrated that the post irradiation leakage current in damaged gate oxide was determined by the initial gate stress after the irradiation and the damage was stable even after a million of gate stress repetition.
  • Keywords
    leakage currents; power MOSFET; radiation effects; damaged gate oxide; heavy ion irradiation; high LET heavy ions; initial gate stress; latent damage; post irradiation leakage current; power MOSFET; Dielectric breakdown; Electric breakdown; Epitaxial layers; Leakage current; MOSFETs; Neck; Prototypes; Stress; Synchrotrons; Voltage; Heavy ion; latent damage; power MOSFET;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.2008.2007902
  • Filename
    4723784