Title :
Fully Self-Consistent 3-D Modeling of Inductively Coupled Plasmas
Author :
Agarwal, Abhishek ; Kenney, Jason A. ; Rauf, Sakandar ; Collins, Ken
Author_Institution :
Appl. Mater. Inc., Sunnyvale, CA, USA
Abstract :
Inductively coupled plasma (ICP) reactors utilize multidimensional antenna segments among other azimuthally asymmetric components. Computed 3-D electric fields, power deposition, and electron density are presented for an ICP using a 3-D electromagnetic plasma model, which self-consistently treats the electromagnetic phenomena and the antenna-plasma coupling.
Keywords :
antennas in plasma; high-frequency discharges; plasma density; plasma simulation; 3D electric fields; 3D electromagnetic plasma model; 3D modeling; ICP; antenna-plasma coupling; azimuthally asymmetric components; electromagnetic phenomena; electron density; inductively coupled plasma reactors; multidimensional antenna; Antennas; Coils; Computational modeling; Dielectrics; Iterative closest point algorithm; Mathematical model; Plasmas; Capacitive coupling; FDTD methods; inductively coupled plasma; plasma modeling; plasma properties; plasma properties.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2336881
