DocumentCode
104626
Title
Fully Self-Consistent 3-D Modeling of Inductively Coupled Plasmas
Author
Agarwal, Abhishek ; Kenney, Jason A. ; Rauf, Sakandar ; Collins, Ken
Author_Institution
Appl. Mater. Inc., Sunnyvale, CA, USA
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
2832
Lastpage
2833
Abstract
Inductively coupled plasma (ICP) reactors utilize multidimensional antenna segments among other azimuthally asymmetric components. Computed 3-D electric fields, power deposition, and electron density are presented for an ICP using a 3-D electromagnetic plasma model, which self-consistently treats the electromagnetic phenomena and the antenna-plasma coupling.
Keywords
antennas in plasma; high-frequency discharges; plasma density; plasma simulation; 3D electric fields; 3D electromagnetic plasma model; 3D modeling; ICP; antenna-plasma coupling; azimuthally asymmetric components; electromagnetic phenomena; electron density; inductively coupled plasma reactors; multidimensional antenna; Antennas; Coils; Computational modeling; Dielectrics; Iterative closest point algorithm; Mathematical model; Plasmas; Capacitive coupling; FDTD methods; inductively coupled plasma; plasma modeling; plasma properties; plasma properties.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2336881
Filename
6861999
Link To Document