Title :
A new method of depositing garnet films
Author :
Braginski, Aleksander I.
Author_Institution :
Westinghouse Research Laboratories, Pittsburgh, Pa.
fDate :
9/1/1971 12:00:00 AM
Abstract :
Yttrium iron garnet films were deposited by chemical transport using a solid Fe2O3source and an additional YCl3vapor delivery. Layers deposited on GdGaG were epitaxial. At the low deposition rates employed, substitution of substrate by film components was observed. The deposition method was applicable also to rare-earth garnets; GdIg and DyIG were prepared.
Keywords :
Epitaxial growth; Magnetic bubble materials; YIG; YIG films; Chemical vapor deposition; Garnet films; Inductors; Iron; Microwave devices; Solids; Substrates; Temperature; Thermodynamics; Yttrium;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1971.1067079
