Title :
Molecular beam epitaxy of GaAs voltage variable capacitors
Author :
Cho, Andrew Y. ; Reinhart, F.K.
fDate :
12/1/1973 12:00:00 AM
Keywords :
Capacitors; Etching; Gallium arsenide; Inhibitors; Molecular beam epitaxial growth; Nonlinear optics; Optical films; Optical sensors; Resists; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1973.17824
