Title :
Machining integrated optical structures in photoresist
Author :
Dill, F.H. ; Neureuther, A.R.
fDate :
12/1/1973 12:00:00 AM
Keywords :
Absorption; Etching; Inhibitors; Integrated optics; Machining; Nonlinear optics; Optical films; Optical sensors; Optical waveguides; Resists;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1973.17826
