Design, Modeling, and Fabrication of MEMS-Based Multicapillary Gas Chromatographic Columns

This paper describes different approaches to achieve high-performance microfabricated silicon-glass separation columns for microgas chromatography systems. The capillary width effect on the separation performance has been studied by characterization of 250-, 125-, 50-, and 25-??m -wide single-capillary columns (SCCs) fabricated on a 10 ?? 8 mm² die. The highest plate number (12 500/m), reported to date for MEMS-based silicon-glass columns, has been achieved by 25-??m-wide columns coated by a thin layer of polydimethylsiloxane stationary phase using static coating technique. To address the low sample capacity of these narrow columns, this paper presents the first generation of MEMS-based ??multicapillary?? columns (MCCs) consisting of a bundle of narrow-width rectangular capillaries working in parallel. The theoretical model for the height-equivalent-to-a-theoretical-plate (HETP) of rectangular MCCs has been developed, which relates the HETP to the discrepancies of the widths and depths of the capillaries in the bundle. Two-, four-, and eight-capillary MCCs have been designed and fabricated to justify the separation ability of these columns. These MCCs capable of multicomponent gas separation provide a sample capacity as large as 200 ng compared to 5.5 ng for 25-??m-wide SCCs.