Title :
Ultraviolet Assisted 3-D Microstructures on PET
Author :
Komijani, Y. ; Izadi, N. ; Khadem-Hosseinieh, B. ; Mohajerzadeh, S.
Author_Institution :
Dept. of Electr. Eng & Comput. Eng., Tehran Univ.
Abstract :
UV-assisted deep vertical etching of polyethylene terephthalate (PET) is shown to be suitable for realizing high resolution and high-aspect-ratio features, and is applied to fabrication of microelectromechanical systems (MEMS) and photonics devices. The technique has the potential to be used for structures below micrometer regime
Keywords :
etching; micromachining; micromechanical devices; organic compounds; photonic crystals; polymers; 3D microstructures; MEMS; PET; deep vertical etching; high-aspect-ratio structures; microelectromechanical systems; micromachining; photonics devices; polyethylene terephthalate; ultraviolet assisted microstructures; Anisotropic magnetoresistance; Containers; Etching; Fabrication; Microstructure; Photonic crystals; Plastics; Polyethylene; Positron emission tomography; Temperature; High-aspect-ratio structures; micromachining; polyethylene terephthalate (PET); vertical etching;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2006.877845
