Integrated-optic grating-scale-displacement sensor using linearly focusing grating couplers

Author

Ura, S. ; Shinohara, M. ; Suhara, T. ; Nishihara, H.

Author_Institution

Dept. of Electron. Eng., Osaka Univ., Japan

Volume

6

Issue

2

fYear

1994

Firstpage

239

Lastpage

241

Abstract

An integrated-optic device was proposed for sensing displacement/position of a grating scale. The sensor is constructed by integrating a glass waveguide, a pair of linearly focusing grating couplers (LFGCs) and a pair of photodiodes (PDs) on a Si substrate. Two beams, radiated by the LFGCs from the sensor, overlap with each other on the grating scale. The beams diffracted by the grating scale interfere on the PDs, and the interference signals vary when the grating scale moves along its grating vector direction. The device was designed and fabricated, and the variation of output photocurrents was experimentally confirmed.<>

Keywords

diffraction gratings; displacement measurement; integrated optics; laser beams; optical couplers; optical sensors; photodiodes; position measurement; 0.8 micron; Si; Si substrate; displacement/position sensing; glass waveguide; grating vector direction; integrated-optic grating-scale-displacement sensor; interference signals; linearly focusing grating couplers; output photocurrents; photodiodes; Couplers; Diffraction gratings; Glass; Interferometers; Optical diffraction; Optical interferometry; Optical sensors; Optical waveguides; Photoconductivity; Photodiodes;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.275437

Filename

275437