DocumentCode
1048851
Title
V-1 laser fabrication of large-area arrays: Thin-film silicon isolated devices on fused Silica substrates
Author
Laff, R.A. ; Hutchins, G.L.
Volume
21
Issue
11
fYear
1974
fDate
11/1/1974 12:00:00 AM
Firstpage
743
Lastpage
743
Keywords
Heating; Laser beams; Optical arrays; Optical device fabrication; Semiconductor laser arrays; Semiconductor thin films; Silicon compounds; Substrates; Thin film devices; X-ray lithography;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1974.18037
Filename
1477852
Link To Document