DocumentCode
1049344
Title
Low loss single-mode optical waveguides with large cross-section in standard epitaxial silicon
Author
Splett, A. ; Petermann, K.
Author_Institution
Inst. fur Hochfrequenztech., Tech. Univ. Berlin, Germany
Volume
6
Issue
3
fYear
1994
fDate
3/1/1994 12:00:00 AM
Firstpage
425
Lastpage
427
Abstract
Single-mode waveguides, well matched to the fiber spot size, have been fabricated by chemical etching of standard epitaxial silicon. Analytical estimations for the waveguide attenuation are given. Measured waveguide losses below 1.5 dB/cm have been obtained at both wavelengths, /spl lambda/=1.3 μm and /spl lambda/=1.55 μm.
Keywords
elemental semiconductors; integrated optics; optical losses; optical waveguides; silicon; 1.3 mum; 1.55 mum; Si; Si layer waveguiding; chemical etching; fiber spot size; integrated optics; large cross-section; low loss single-mode optical waveguides; standard epitaxial silicon; waveguide attenuation; waveguide losses; Attenuation; Doping; Optical losses; Optical refraction; Optical variables control; Optical waveguides; Propagation losses; Silicon; Slabs; Substrates;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.275507
Filename
275507
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